{"title":"Electron Beam Evaporation (EBE)","description":"\u003cp\u003e\u003cstrong\u003eElectron-beam evaporation gives you line-of-sight, high-purity thin films of metals, oxides, and refractories that are difficult or impossible to deposit by thermal boats or sputter targets.\u003c\/strong\u003e A focused electron beam locally heats the source pellet inside a water-cooled crucible, so the beam energy — not the crucible — drives evaporation. That decoupling lets you reach the vapor pressures needed for tungsten, molybdenum, tantalum, platinum, titanium, nickel, and most stable oxides (Al2O3, SiO2, HfO2, Ta2O5, TiO2, ZrO2) without contaminating the melt from the liner.\u003c\/p\u003e\n\n\u003cp\u003eFor electrochemistry research the technique is most often used to lay down current collectors and interlayers on model substrates: thin Cu, Ni, Ti, or Au films on Si, glass, or polymer for half-cell studies; Pt and Au films for reference and counter electrodes; Ti or Cr adhesion layers under noble-metal stacks; and dense oxide barriers between active layers and current collectors. In thin-film and solid-state battery work, e-beam is a common route to model cathode and anode films, dense lithium-conducting oxide buffers, and pinhole-free encapsulation layers. In fuel-cell and electrolyzer research, it is used to deposit catalyst-support metals and dense oxide protection on bipolar-plate coupons.\u003c\/p\u003e\n\n\u003cp\u003eThis collection groups consumables and source materials matched to e-beam workflows: high-purity metal pellets and slugs sized for standard pocket geometries, sintered and pressed oxide tablets, graphite and copper crucible liners, and substrate holders compatible with planetary fixturing. Pair them with the right vacuum and rate-monitoring infrastructure on the chamber side.\u003c\/p\u003e\n\n\u003cp\u003eIf you are surveying all vapor-phase routes, start with \u003ca href=\"\/collections\/vapor-phase-synthesis\"\u003eVapor-Phase Synthesis\u003c\/a\u003e for the umbrella of PVD and CVD options, or move sideways to Synthesis Equipment for furnace, solution, and milling routes. For lab infrastructure that the deposition tool depends on, see Laboratory Equipment.\u003c\/p\u003e\n","products":[{"product_id":"epebec","title":"ECS-P Electron Beam Evaporation Coater, EPEBEC","description":"\u003cp\u003e An Electron Beam (E-beam) Evaporation Coater is a sophisticated Physical Vapor Deposition (PVD) instrument used to deposit high-purity thin films. Unlike standard thermal evaporation, which uses resistive heating, E-beam evaporation utilizes a high-energy electron beam to directly heat the source material. This technology is essential for depositing materials with extremely high melting points that would otherwise destroy a traditional resistive boat or filament.\u003c\/p\u003e\n\u003cp\u003eA high-performance E-beam system consists of several integrated sub-systems designed to manage high energy in a vacuum environment. (1) \u003cstrong\u003eElectron Beam Source (E-Gun)\u003c\/strong\u003e: A tungsten filament is heated to emit electrons via thermionic emission. Then a high-voltage field (typically 5 to 10 kV) accelerates these electrons toward the target. To protect the filament from being coated by the evaporating material, the electron beam is bent 270° using permanent magnets or electromagnets. This ensures only the beam reaches the crucible. (2) \u003cstrong\u003eCrucible and Multi-Pocket Hearth\u003c\/strong\u003e: Because the electron beam delivers intense localized heat, the copper hearth must be continuously water-cooled to prevent the crucible itself from melting.  Most systems feature a rotating \"pocket\" design (e.g., 4 or 6 pockets), allowing for the sequential deposition of different materials (like Ti\/Au or Al2O3\/Pt) without breaking the vacuum. (3) \u003cstrong\u003eVacuum System\u003c\/strong\u003e: To ensure the electrons reach the target without colliding with gas molecules, the system must operate at high vacuum. Typically 10^{-4} Pa to 10^{-7} Pa, which ssually a combination of a dry scroll pump (roughing) and a high-speed Turbomolecular or Cryogenic pump.\u003c\/p\u003e\n\u003ctable width=\"100%\" style=\"height: 473px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003cem\u003ePart Number\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eEPEBEC (EP-EBEC)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003cem\u003ePower\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eAC380V±10%, three-phases, 50\/60Hz, 4000 W\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 176.2px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 176.2px;\"\u003e\u003cem\u003eElectron Beam Evaporator Features\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 176.2px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eEvaporation Source: 8-10 kW evaporation gun\u003c\/li\u003e\n\u003cli\u003e4-8 crucibles can be supplied\u003c\/li\u003e\n\u003cli\u003eAdditional 2-4 resistance or organic sources can be provided\u003c\/li\u003e\n\u003cli\u003eSample Stage: ≤200mm * 200mm\u003c\/li\u003e\n\u003cli\u003eFilm Uniformity: ±3％\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eVacuum: ≤3*10^(-5) Pa, Mechanical Vacuum Pump + Turbo Pump\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eVacuum Rate: 8*10^(-4) in 30 min, and can keep 12 h ≤5 Pa\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eA Water chiller is included to cool down the cover flange.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 67.2px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 67.2px;\"\u003e\u003cem\u003eCertification\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 67.2px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE certified\u003c\/li\u003e\n\u003cli\u003eUL and CSA certification is available upon request at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.8px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 86.8px;\"\u003e\u003ci\u003eDimension\u003c\/i\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 86.8px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003eL1800 × W800 × H1800 mm\u003c\/li\u003e\n\u003cli\u003eIt can be integrated with Ar-filled glovebox for air\/humidity-sensitive materials processing \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e         \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EPEBEC_02_100x100.png?v=1778118772\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003ci\u003eWeight\u003c\/i\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003e~250 kg\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eReferences\u003c\/strong\u003e:\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.sciencedirect.com\/science\/article\/abs\/pii\/S004060900600825X\"\u003eC. L. Li, et al., Physical and electrochemical characterization of amorphous lithium lanthanum titanate solid electrolyte thin-film fabricated by e-beam evaporation, Thin Solid Films, 2006, 515, 1886-1892\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/link.springer.com\/article\/10.1007\/s11581-020-03842-9\"\u003eD. Sivlin, et al., ZrO2 coating via e-beam evaporation on PE separators for lithium-ion batteries, Ionics, 2021, 27, 577–586\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.sciencedirect.com\/science\/article\/abs\/pii\/S2214785323008921\"\u003eS. Varghese, et al., Thin films of solid electrolyte lithium sulfate deposited by e-beam evaporation, Materials Today Proceedings, DOI: 10.1016\/j.matpr.2023.02.328\u003c\/a\u003e. \u003c\/p\u003e","brand":"PDZK","offers":[{"title":"Default Title","offer_id":47633726734566,"sku":"EPEBEC","price":8888888.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EPEBEC_main.png?v=1778113368"}],"url":"https:\/\/echemsupplies.com\/collections\/electron-beam-evaporation.oembed","provider":"EChem Supplies","version":"1.0","type":"link"}