{"product_id":"egs2ste","title":"ECS-GS 2-Source Thermal Evaporator (Samples≤60mm*60mm), EGS2STE","description":"\u003cp\u003eA 2-Source Thermal Evaporator (often called a co-evaporation system) is a physical vapor deposition (PVD) tool designed to heat and evaporate two different source materials simultaneously or sequentially within a high-vacuum chamber. This setup is essential for creating alloy thin films, doped layers, or multi-layer coatings without breaking vacuum.\u003c\/p\u003e\n\u003cp\u003eThe thermal evaporation process relies on passing a high electrical current through a resistive heating element (the \"source\") which holds the coating material. (1) \u003cstrong\u003eVacuum Environment\u003c\/strong\u003e: The chamber is pumped down to high vacuum (typically 10^{-5} to 10^{-7} Torr) to ensure the evaporated atoms have a long mean free path and do not oxidize. (2) \u003cstrong\u003eDual Source Configuration\u003c\/strong\u003e: Two independent power supplies control two separate heating elements (boats, filaments, or crucibles). (3) \u003cstrong\u003eEvaporation\u003c\/strong\u003e: The materials reach their sublimation or melting point and turn into a vapor. (4) \u003cstrong\u003eDeposition\u003c\/strong\u003e: The vapor travels in a line-of-sight path and condenses onto a substrate located above the sources.\u003c\/p\u003e\n\u003ctable style=\"height: 1259px;\" width=\"100%\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003cem\u003ePart Number\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eEGS2STE (EGS-2STE)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 67.2px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 67.2px;\"\u003e\u003cem\u003ePower\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 67.2px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eAC380V±10%, three-phases, 50\/60Hz, 3000 W\u003c\/li\u003e\n\u003cli\u003eAC220V±10% can be supplied upon request.\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 184.8px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 184.8px;\"\u003e\u003cem\u003eVacuum System Features\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 184.8px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum Chamber: SS304, L260*D260*H450mm\u003c\/li\u003e\n\u003cli\u003eTwo doors (front and back), and an observation window\u003c\/li\u003e\n\u003cli\u003eTurbo pump, gate valve, vacuum gauge, and gas filling valve, and angle valve are installed at chamber side. \u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003eVacuum Level: 5*10^(-5) Pa, normally it takes 40 min to approach this target.\u003c\/li\u003e\n\u003cli\u003eSample change and addition can be conducted without stop of turbo pump. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 226.8px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 226.8px;\"\u003e\u003cem\u003eSample Loading System\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 226.8px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThe sample loading stage adopts the \"insertion\" structure and the maximum sample size is \u003cspan style=\"color: rgb(255, 42, 0);\"\u003e60mm*60mm\u003c\/span\u003e. \u003c\/li\u003e\n\u003cli\u003eDistance between mask to sample is 0.2 mm. \u003c\/li\u003e\n\u003cli\u003eSample stage rotation speed: 30 rpm\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e          \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EGS2STE_02_100x100.png?v=1777188932\" alt=\"\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 323.8px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 323.8px;\"\u003e\u003cem\u003eDeposition System\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 323.8px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo evaporation sources that cover metal, organic, and inorganic materials. Each evaporation source has individual cooling system. \u003c\/li\u003e\n\u003cli\u003eVertical distance between source and substrate is ~300 mm.\u003c\/li\u003e\n\u003cli\u003eSeparation plate is designed for avoiding cross-contamination.\u003c\/li\u003e\n\u003cli\u003eDC power source: 8V-180A, 1.5 kW. \u003c\/li\u003e\n\u003cli\u003eMax. Temperature: 1500℃ (adjusting current to control the heating temperature and heating rate for evaporation).\u003c\/li\u003e\n\u003cli\u003eA thickness monitor (GT ITC-5) with quartz crystal microbalance (QCM) unit is installed for tracking the in-real thickness. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e           \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EGS2STE_03_100x100.png?v=1777189889\" alt=\"\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 207.2px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 207.2px;\"\u003e\u003cem\u003eControl System\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 207.2px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eHMI touch screen control.\u003c\/li\u003e\n\u003cli\u003eAutomatic and manual control on\/off of the mechanical and turbo vacuum pump, valve, and electrode switch. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e        \u003cimg style=\"float: none;\" alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EGS2STE_04_100x100.png?v=1777190650\"\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 39.2px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 39.2px;\"\u003e\u003cem\u003eAccessories (\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eOptional\u003c\/span\u003e)\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 39.2px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eA water chiller (\u003ca href=\"https:\/\/echemsupplies.com\/products\/eadtcwc?variant=47528488698086\"\u003eEADTCWC\u003c\/a\u003e) within 10-25 ℃ and 0.1-0.3 MPa is required for cooling the evaporation electrodes and turbo pump. \u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e          \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EADTCWC_main_100x100.png?v=1775781572\" alt=\"\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eA gas compressor (\u003ca href=\"https:\/\/echemsupplies.com\/products\/euqofgc?variant=47513044156646\"\u003eEUQOFGC\u003c\/a\u003e) is needed to provide gas pressure of 60-80 psi for controlling pneumatic valves.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e        \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EUQOFGC_main_100x100.png?v=1775414665\" alt=\"\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 67.2px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 67.2px;\"\u003e\u003cem\u003eCertification\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 67.2px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE certified\u003c\/li\u003e\n\u003cli\u003eUL and CSA certification is available upon request at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003ci\u003eDimension\u003c\/i\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003eL900 * W700 * H1500 mm\u003c\/li\u003e\n\u003cli\u003eIt can be integrated with Ar-filled glovebox for air\/humidity-sensitive materials (eg: Li) evaporation and deposition. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003ci\u003eWeight\u003c\/i\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003e~300 kg\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eReferences\u003c\/strong\u003e:\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/full\/10.1002\/aenm.202203256\"\u003eE. Adhitama, et al., On the Practical Applicability of the Li Metal-Based Thermal Evaporation Prelithiation Technique on Si Anodes for Lithium Ion Batteries, Adv. Energy Mater., 2023, 13, 2203256\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.sciencedirect.com\/science\/article\/pii\/S2666248524000039\"\u003eL. Fallarino, et al., On the practical applicability of thermal evaporation technique to fabricate Na thin metal anodes for Na-metal batteries, Journal of Power Sources Advances, 2024, 26, 100137\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.sciencedirect.com\/science\/article\/pii\/S0378775324011704\"\u003eB. Acebedo, et al., On the role of ultrathin lithium metal anodes produced by thermal evaporation, Journal of Power Sources, 2024, 618, 235218\u003c\/a\u003e. \u003c\/p\u003e","brand":"GTKJ","offers":[{"title":"Default Title","offer_id":47577653149926,"sku":"EGS2STE","price":8888888.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EGS2STE_main.png?v=1777188887","url":"https:\/\/echemsupplies.com\/products\/egs2ste","provider":"EChem Supplies","version":"1.0","type":"link"}