{"product_id":"enhmzcvdtfs1200","title":"ECS-N 1200℃ Horizontal Multiple-Zones (3-6 Zones) CVD Tube Furnace System, ENHMZCVDTFS1200","description":"\u003cp\u003eThe horizontal multiple-zones CVD tube furnace system provides independent multi-zone temperature control across an extended flat thermal region, ideal for precise chemical vapor deposition (CVD) workflows.\u003c\/p\u003e\n\u003cp\u003eThe main structural features of the horizontal CVD tube furnace system are: (1) \u003cstrong\u003eMulti-Zone Independent PID Control\u003c\/strong\u003e: Features 2 or 3 independently programmable heating zones (such as a multi-zone configuration with Kanthal A1 elements). This allows researchers to establish distinct pre-heating, reaction, and cooling temperature profiles along a single continuous process tube. (2) \u003cstrong\u003eExtended Constant Temperature Zone\u003c\/strong\u003e: Multiple zones significantly widen the flat, uniform thermal zone (~ 1 °C precision), making these systems essential for growing uniform 2D materials, synthesizing carbon nanotubes\/graphene, or executing vapor-transport depositions. (3) \u003cstrong\u003eIntegrated Gas-Mixing Manifold \u0026amp; Vacuum System\u003c\/strong\u003e: Complete turnkey CVD configurations integrate digital mass flow controllers (MFCs), multi-channel gas inlet lines (Ar, N2, H2, or precursor reactant gases), stainless steel vacuum sealing flanges, and a backing\/turbomolecular vacuum pump package. (4) \u003cstrong\u003eIntelligent Touch Screen \/ Touchpad HMI\u003c\/strong\u003e: Utilizes advanced multi-segment programmable microcontrollers or touch panels to automate complex ramp-and-soak processing cycles with real-time data logging and PC connectivity.\u003c\/p\u003e\n\u003ctable width=\"100%\" style=\"height: 1643.67px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\u003cem\u003ePart Number\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eENHMZCVDTFS1200 (EN-HMZCVDTFS1200)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 106.4px;\"\u003e\n\u003ctd style=\"height: 106.4px;\"\u003e\u003cem\u003eGeneral Features\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 106.4px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eHigh purity quartz tube with high anti-corrosion performance\u003c\/li\u003e\n\u003cli\u003eHigh purity Al2O3 insulation materials for saving energy \u003c\/li\u003e\n\u003cli\u003eTube hearth with dual air-cooling structure and automatic open top cover \u003c\/li\u003e\n\u003cli\u003eProgramming heating recipe setting and recording for continuous annealing\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 216.8px;\"\u003e\n\u003ctd style=\"height: 216.8px;\"\u003e\u003cem\u003eCVD Mechanism\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 216.8px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThe multiple heating zones design is suitable for CVD experiment, where the vapor of different precursors are flowed together onto the substrate and form the desirable product. The follow picture shows the working mechanism of the typical two zones CVD system. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e         \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENH2ZTFTSC1200_mechanism_160x160.jpg?v=1794167089\" alt=\"\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 686px;\"\u003e\n\u003ctd style=\"height: 686px;\"\u003e\u003cem\u003eTube Furnace Features\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 686px;\"\u003e\n\u003cul\u003e\n\u003cli\u003ePower: AC380V±10%, three-phases, 50\/60Hz, (1) Three Zones:  6-10 kW; (2) Four Zones: 8-14 kW; (3) 10-15 kW; (4) 12-18 kW \u003c\/li\u003e\n\u003cli\u003eHeating Temperature: Max. 1200 ℃ (\u0026lt;1 h)\u003c\/li\u003e\n\u003cli\u003eContinuous Operation Temperature: 300-1150 ℃ (±1℃)\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003eHeating Rate: ≤20℃\/min\u003c\/li\u003e\n\u003cli\u003eProcessing quartz tube: Φ50*1600mm (standard size). Other size options, such as Φ25*1600mm, Φ60*1600mm, Φ80*1600mm, and Φ100*1600mm also can be supplied upon request.\u003c\/li\u003e\n\u003cli\u003eHeating Zone:\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e          (1) \u003cstrong\u003eThree Zones\u003c\/strong\u003e: (i) 200mm*3; (ii) 200+300+200mm; (iii) 200+400+200mm;\u003c\/p\u003e\n\u003cp\u003e               (iv) 300mm*3; (v) 300+400+300 mm\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e          (2) \u003cstrong\u003eFour Zones\u003c\/strong\u003e: (i) 200mm*4; (ii) 200+300+300+200mm; (iii) 200+400+400+200 mm\u003c\/p\u003e\n\u003cp\u003e               (iv) 300mm*4; (v) 300+400+400+300mm\u003c\/p\u003e\n\u003cp\u003e          (3) \u003cstrong\u003eFive Zones\u003c\/strong\u003e: (i) 200mm*5; (ii) 300mm*5\u003c\/p\u003e\n\u003cp\u003e          (4) \u003cstrong\u003eSix Zones\u003c\/strong\u003e: (i) 200mm*6; (ii) 300mm*6\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eHeating Element: Mo-doped Fe-Cr-Al\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e         \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENMHTFTSC1200_02_100x100.jpg?v=1793814194\" alt=\"\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eSealing Flanges are included, but the temperature calibration probe can be supplied upon request with additional cost. \u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e         \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENMHTFTSC1200_05_f6d9b107-0265-4fec-a962-d88730d9e153_100x100.jpg?v=1793815529\" alt=\"\" style=\"float: none;\"\u003e     \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENMHTFTSC1200_06_100x100.jpg?v=1793815529\" alt=\"\" style=\"float: none;\"\u003e        \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENMHTFTSC1200_07_100x100.jpg?v=1793815529\" alt=\"\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003eProgrammable temperature setting profiles in a 7\" touch screen control panel. There are maximum 15 heating profiles can be saved for repeatable use.   \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 152.875px;\"\u003e\n\u003ctd style=\"height: 152.875px;\"\u003e\n\u003cp\u003e\u003cem\u003eGas Flow System (\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eOptional\u003c\/span\u003e)\u003c\/em\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"height: 152.875px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan\u003eThe gas flow unit with 2-4 channels (eg: \u003ca href=\"https:\/\/echemsupplies.com\/products\/enemcgmsr?variant=48200201961702\u0026amp;_pos=8\u0026amp;_sid=45ecc828d\u0026amp;_ss=r\"\u003eENEMCGMSR\u003c\/a\u003e, \u003ca href=\"https:\/\/echemsupplies.com\/products\/enmcgmsts?variant=48203279007974\u0026amp;_pos=7\u0026amp;_sid=45ecc828d\u0026amp;_ss=r\"\u003eENMCGMSTS\u003c\/a\u003e) can be integrated into the CVD system.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eThe flow rates 50-500 sccm are available. \u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cspan\u003e           \u003c\/span\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENHMZCVDTFS1200_gas_flow_01_100x100.jpg?v=1794204641\" alt=\"\" style=\"margin-bottom: 16px; float: none;\" width=\"108\" height=\"98\"\u003e            \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENHMZCVDTFS1200_gas_flow_02_160x160.jpg?v=1794204641\" alt=\"\" style=\"float: none;\" width=\"145\" height=\"110\"\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 106.4px;\"\u003e\n\u003ctd style=\"height: 106.4px;\"\u003e\n\u003cp\u003e\u003cem\u003eLow Vacuum System (\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eOptional\u003c\/span\u003e)\u003c\/em\u003e\u003c\/p\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003cbr\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"height: 106.4px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eAC220V±10%, single-phases, 50\/60Hz, ~600 W\u003c\/li\u003e\n\u003cli\u003eVacuum Pumping Speed: 3 L\/s\u003c\/li\u003e\n\u003cli\u003eGas inlet\/outlet Port Size: KF16\/25\u003c\/li\u003e\n\u003cli\u003eSystem Vacuum: 3-5 Pa\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 145.6px;\"\u003e\n\u003ctd style=\"height: 145.6px;\"\u003e\n\u003cp\u003e\u003cem\u003eHigh Vacuum System (\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eOptional\u003c\/span\u003e)\u003c\/em\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"height: 145.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eAC220V±10%, single-phases, 50\/60Hz, ~1500 W\u003c\/li\u003e\n\u003cli\u003eVacuum Pumping Speed: 110 L\/s (even higher one, such as 600 L\/s can be supplied upon request).\u003c\/li\u003e\n\u003cli\u003eDigital vacuum gauge\u003c\/li\u003e\n\u003cli\u003eGas inlet\/outlet Port Size: KF25\u003c\/li\u003e\n\u003cli\u003eSystem Vacuum: 4.3*10^(-3) Pa\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.8px;\"\u003e\n\u003ctd style=\"height: 86.8px;\"\u003e\u003cem\u003eCertification\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 86.8px;\"\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eCE certified\u003c\/li\u003e\n\u003cli\u003eUL and CSA certification is available upon request at extra cost\u003c\/li\u003e\n\u003cli\u003eOne-year warranty and life-time technical support. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\u003cem\u003eDimension\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eL2000 × D500× H1200 mm (five zones as an example)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\u003cem\u003eWeight\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003e~250 kg (depends on the heating zones)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"NBD","offers":[{"title":"3 Heating Zones","offer_id":67983370453222,"sku":"ENH3ZCVDTFS1200","price":9999.0,"currency_code":"USD","in_stock":true},{"title":"4 Heating Zones","offer_id":67983370485990,"sku":"ENH4ZCVDTFS1200","price":13999.0,"currency_code":"USD","in_stock":true},{"title":"5 Heating Zones","offer_id":67983370518758,"sku":"ENH5ZCVDTFS1200","price":16999.0,"currency_code":"USD","in_stock":true},{"title":"6 Heating Zones","offer_id":67983370551526,"sku":"ENH6ZCVDTFS1200","price":19999.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENHMZCVDTFS1200_main.jpg?v=1794204457","url":"https:\/\/echemsupplies.com\/products\/enhmzcvdtfs1200","provider":"EChem Supplies","version":"1.0","type":"link"}