{"product_id":"enmcvds","title":"ECS-N Mist Chemical Vapor Deposition (CVD) System (Max. 1200℃, 2\" Quartz Tube, Spray Pyrolysis) for Thin Film Coating, ENMCVDS","description":"\u003cp\u003eMist Chemical Vapor Deposition (Mist CVD) (also named Ultrasonic Spray Pyrolysis) is a solution-based thin-film deposition technique that operates at atmospheric pressure, making it a highly cost-effective and energy-efficient alternative to traditional vacuum-based CVD. By atomizing liquid precursors into a fine aerosol (mist), this method allows you to deposit high-quality, conformal functional films onto complex surfaces—ideal for protecting sensitive battery materials like NFPP and NMC.\u003c\/p\u003e\n\u003cp\u003eMist CVD bridges the gap between liquid-phase processing and gas-phase deposition. (1) \u003cstrong\u003eAtomization\u003c\/strong\u003e: An ultrasonic transducer (typically 1.6–2.4 MHz) creates a fine mist of droplets (usually 1–3 um in diameter) from a liquid precursor solution. (2) \u003cstrong\u003eTransportation\u003c\/strong\u003e: A carrier gas (N2, Ar, or air) carries the mist into a heated reaction zone. (3) \u003cstrong\u003eLeidenfrost Effect\u003c\/strong\u003e: As the mist reaches the heated substrate (typically 200℃ to 500℃, a vapor cushion forms beneath the droplets. This prevents the droplets from \"splashing\" and ensures they decompose chemically near or on the surface. (4) \u003cstrong\u003eConformal Film Growth\u003c\/strong\u003e: The precursor decomposes to form a solid film, while solvent vapors and byproducts are swept away by the exhaust.\u003c\/p\u003e\n\u003ctable width=\"100%\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cem\u003ePart Number\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eENMCVDS (EN-MCVDS)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cem\u003eUltrasonic Mist Generation System\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003ePower: AC220V±10%, single-phases, 50\/60Hz, 55 W (Atomizer: 35 W, Peristaltic Pump: 20W)\u003c\/li\u003e\n\u003cli\u003eFrequency: 2.4 MHz\u003c\/li\u003e\n\u003cli\u003ePeristaltic Pump Flow Rate: 9 mL\/min, I.D. Φ2 * T1mm\u003c\/li\u003e\n\u003cli\u003eGas Flow Meter: 0.5-8 L\/min\u003c\/li\u003e\n\u003cli\u003eTank Volume: 160 mL\u003c\/li\u003e\n\u003cli\u003eMist Droplet Size: 5-10 um\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cem\u003eCVD Tube Furnace Features\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eAC220V±10%, single-phases, 50\/60Hz, 1200 W\u003c\/li\u003e\n\u003cli\u003eMaximum Heating Temperature: 1200℃ (\u0026lt;30 min)\u003c\/li\u003e\n\u003cli\u003eContinuously Operation Temperature: ≤1150℃\u003c\/li\u003e\n\u003cli\u003eRecommended Heating Rate: 10 ℃\/min\u003c\/li\u003e\n\u003cli\u003eFurnace Hearth: Φ80×200mm\u003c\/li\u003e\n\u003cli\u003eFurnace Tube: Quartz, Φ50*600mm\u003c\/li\u003e\n\u003cli\u003eHeating Element: Resistance heating type\u003c\/li\u003e\n\u003cli\u003eThermocouple: K-type\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cem\u003eNotes\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe door is not allowed to be opened when the furnace temperature higher than 300 ℃\u003c\/li\u003e\n\u003cli\u003eThe relative pressure inside the quart tube should less than 0.125 MPa \u003c\/li\u003e\n\u003cli\u003eUnder high vacuum (10-3 torr) operation, the temperature should less than 800℃\u003c\/li\u003e\n\u003cli\u003eThe hazardous and flammable gases should be highly cautious, and the protections should be prepared before operation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cem\u003eCertification\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eCE certified\u003c\/li\u003e\n\u003cli\u003eUL and CSA certification is available upon request at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cem\u003eDimension\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eL800 × W400 × H300 mm\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cem\u003eWeight\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003e~40 kg\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eReferences\u003c\/strong\u003e:\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/iopscience.iop.org\/article\/10.1088\/1361-6528\/ac30f4\/meta\"\u003eA. Kuddus, et al., Mist chemical vapor deposition of crystalline MoS2 atomic layer films using sequential mist supply mode and its application in field-effect transistors, Nanotrchnology, 2022, 33, 045601.\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/pubs.acs.org\/doi\/abs\/10.1021\/acsami.7b04235\"\u003eJ. Park, et al., High-Performance Zinc Tin Oxide Semiconductor Grown by Atmospheric-Pressure Mist-CVD and the Associated Thin-Film Transistor Properties, ACS Appl. Mater. Interfaces 2017, 9, 24, 20656–20663\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.sciencedirect.com\/science\/article\/abs\/pii\/S2542529324002803\"\u003eS. Yao, et al., Mist CVD technology for gallium oxide deposition: A review, Materials Today Physics, 2024, 49, 101604.\u003c\/a\u003e \u003c\/p\u003e","brand":"NBD","offers":[{"title":"Default Title","offer_id":47622803259622,"sku":"ENMCVDS","price":8888888.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ENMCVDS_main.png?v=1777746579","url":"https:\/\/echemsupplies.com\/products\/enmcvds","provider":"EChem Supplies","version":"1.0","type":"link"}