{"product_id":"epebec","title":"ECS-P Electron Beam Evaporation Coater, EPEBEC","description":"\u003cp\u003e An Electron Beam (E-beam) Evaporation Coater is a sophisticated Physical Vapor Deposition (PVD) instrument used to deposit high-purity thin films. Unlike standard thermal evaporation, which uses resistive heating, E-beam evaporation utilizes a high-energy electron beam to directly heat the source material. This technology is essential for depositing materials with extremely high melting points that would otherwise destroy a traditional resistive boat or filament.\u003c\/p\u003e\n\u003cp\u003eA high-performance E-beam system consists of several integrated sub-systems designed to manage high energy in a vacuum environment. (1) \u003cstrong\u003eElectron Beam Source (E-Gun)\u003c\/strong\u003e: A tungsten filament is heated to emit electrons via thermionic emission. Then a high-voltage field (typically 5 to 10 kV) accelerates these electrons toward the target. To protect the filament from being coated by the evaporating material, the electron beam is bent 270° using permanent magnets or electromagnets. This ensures only the beam reaches the crucible. (2) \u003cstrong\u003eCrucible and Multi-Pocket Hearth\u003c\/strong\u003e: Because the electron beam delivers intense localized heat, the copper hearth must be continuously water-cooled to prevent the crucible itself from melting.  Most systems feature a rotating \"pocket\" design (e.g., 4 or 6 pockets), allowing for the sequential deposition of different materials (like Ti\/Au or Al2O3\/Pt) without breaking the vacuum. (3) \u003cstrong\u003eVacuum System\u003c\/strong\u003e: To ensure the electrons reach the target without colliding with gas molecules, the system must operate at high vacuum. Typically 10^{-4} Pa to 10^{-7} Pa, which ssually a combination of a dry scroll pump (roughing) and a high-speed Turbomolecular or Cryogenic pump.\u003c\/p\u003e\n\u003ctable width=\"100%\" style=\"height: 473px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003cem\u003ePart Number\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eEPEBEC (EP-EBEC)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003cem\u003ePower\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eAC380V±10%, three-phases, 50\/60Hz, 4000 W\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 176.2px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 176.2px;\"\u003e\u003cem\u003eElectron Beam Evaporator Features\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 176.2px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eEvaporation Source: 8-10 kW evaporation gun\u003c\/li\u003e\n\u003cli\u003e4-8 crucibles can be supplied\u003c\/li\u003e\n\u003cli\u003eAdditional 2-4 resistance or organic sources can be provided\u003c\/li\u003e\n\u003cli\u003eSample Stage: ≤200mm * 200mm\u003c\/li\u003e\n\u003cli\u003eFilm Uniformity: ±3％\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eVacuum: ≤3*10^(-5) Pa, Mechanical Vacuum Pump + Turbo Pump\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eVacuum Rate: 8*10^(-4) in 30 min, and can keep 12 h ≤5 Pa\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eA Water chiller is included to cool down the cover flange.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 67.2px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 67.2px;\"\u003e\u003cem\u003eCertification\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 67.2px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE certified\u003c\/li\u003e\n\u003cli\u003eUL and CSA certification is available upon request at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.8px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 86.8px;\"\u003e\u003ci\u003eDimension\u003c\/i\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 86.8px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003eL1800 × W800 × H1800 mm\u003c\/li\u003e\n\u003cli\u003eIt can be integrated with Ar-filled glovebox for air\/humidity-sensitive materials processing \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e         \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EPEBEC_02_100x100.png?v=1778118772\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"width: 17.9856%; height: 47.6px;\"\u003e\u003ci\u003eWeight\u003c\/i\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 81.6547%; height: 47.6px;\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003cul\u003e\n\u003cli\u003e~250 kg\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eReferences\u003c\/strong\u003e:\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.sciencedirect.com\/science\/article\/abs\/pii\/S004060900600825X\"\u003eC. L. Li, et al., Physical and electrochemical characterization of amorphous lithium lanthanum titanate solid electrolyte thin-film fabricated by e-beam evaporation, Thin Solid Films, 2006, 515, 1886-1892\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/link.springer.com\/article\/10.1007\/s11581-020-03842-9\"\u003eD. Sivlin, et al., ZrO2 coating via e-beam evaporation on PE separators for lithium-ion batteries, Ionics, 2021, 27, 577–586\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.sciencedirect.com\/science\/article\/abs\/pii\/S2214785323008921\"\u003eS. Varghese, et al., Thin films of solid electrolyte lithium sulfate deposited by e-beam evaporation, Materials Today Proceedings, DOI: 10.1016\/j.matpr.2023.02.328\u003c\/a\u003e. \u003c\/p\u003e","brand":"PDZK","offers":[{"title":"Default Title","offer_id":47633726734566,"sku":"EPEBEC","price":8888888.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/EPEBEC_main.png?v=1778113368","url":"https:\/\/echemsupplies.com\/products\/epebec","provider":"EChem Supplies","version":"1.0","type":"link"}