{"product_id":"esllspcvc","title":"ECS-SL Large Spin Coater with Vacuum Chunk (Max. 550 mm, 2000 rpm), ESLLSPCVC","description":"\u003cp\u003eIn semiconductor processing and thin-film research, a large-format spin coater transitions from standard 2-inch or 4-inch wafer handling into processing large substrates. These systems typically handle panels, photomasks, or wafers ranging from 300 mm (12 inches) up to 600 mm * 600 mm (24 inches) square. Scaling up the physical footprint introduces strict fluid dynamic and mechanical engineering challenges, altering how the system maintains film thickness uniformity (≤±1-2%).\u003c\/p\u003e\n\u003cdiv data-path-to-node=\"5\"\u003e\n\u003cp\u003eWhen moving from small-scale lab coaters to large-format systems, the physics changes fundamentally across three main areas:\u003c\/p\u003e\n\u003cp\u003e(1)\u003cspan\u003e \u003c\/span\u003e\u003cstrong\u003eAerodynamic Drag and Turbulence Management\u003c\/strong\u003e: As the substrate diameter doubles, the linear velocity at the outer edge spikes dramatically at a given RPM (v = w * r). This high edge-speed generates turbulent air currents across the substrate: Turbulence causes uneven solvent evaporation, resulting in \"edge bead\" defects, ripples, and variations in film thickness, therefore large coaters utilize closed-bowl configurations or rotating lids\/shrouds that spin with the substrate. This isolates the fluid boundary layer, forcing the air to move synchronously with the solution to guarantee a smooth, laminar evaporation front.\u003c\/p\u003e\n\u003cp\u003e(2)\u003cspan\u003e \u003c\/span\u003e\u003cstrong\u003eHigh-Torque Servo Dynamics\u003c\/strong\u003e: Large glass panels or 300 mm+ silicon wafers possess substantial mass and rotational inertia. To achieve highly repeatable film thicknesses, the system cannot slowly ramp up to speed. It requires high-torque, brushless DC servomotors paired with precise encoder loops. These motors must accelerate heavy loads up to targets (e.g., 1000 to 4000 RPM) within 0.5 to 1.5 seconds, maintaining a constant velocity without shaking or vibrating the tool chassis.\u003c\/p\u003e\n\u003cp\u003e(3)\u003cspan\u003e \u003c\/span\u003e\u003cstrong\u003eCustom Vacuum Chuck Engineering\u003c\/strong\u003e: Small wafers stay centered via small, generic vacuum rings, while large or non-circular panels (such as square flat-panel display glass) require heavy-duty, customized chucks: (i) \u003cem\u003eMaterial Selection\u003c\/em\u003e: Precision-machined from hard-anodized aluminum, Delrin, or specialized PEEK to minimize thermal transfer. (ii) \u003cem\u003eSurface Layout\u003c\/em\u003e: Integrated with multi-zone concentric vacuum grooves or O-ring seals extending near the outer margins to prevent the edges of flexible substrates from flexing upward under high centrifugal force. (iii)\u003cspan\u003e \u003c\/span\u003e\u003cem\u003eSymmetry\u003c\/em\u003e: Heavily counter-balanced to prevent axis wobbling.\u003c\/p\u003e\n\u003c\/div\u003e\n\u003ctable style=\"height: 1187.49px;\" width=\"100%\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\u003cem\u003ePart Number\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eESLLSPCVC (ESL-LSC-VC)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 23.6px;\"\u003e\n\u003ctd style=\"height: 23.6px;\"\u003e\u003cem\u003ePower\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 23.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eAC220V±10%, single phase, 50\/60Hz, 1000 W\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 295.888px;\"\u003e\n\u003ctd style=\"height: 295.888px;\"\u003e\n\u003cp\u003e\u003cem\u003eChamber \u0026amp; Chuck Features\u003c\/em\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"height: 295.888px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eChamber Materials: NPP \u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003eVacuum Chunk Material: PTFE (for bottom heating version, normally Al vacuum plate will be used)\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003eChamber Size: ~600 mm (the acceptable round sample sizes can be up to 550 mm or square sample: 400*400mm);\u003c\/li\u003e\n\u003cli\u003eVacuum Chunk Size: 500 mm (standard version).\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e          \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ESLLSPCVC_03_100x100.jpg?v=1784838780\" alt=\"\" style=\"float: none;\" width=\"137\" height=\"94\"\u003e        \u003cimg style=\"float: none;\" alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ESLLSPCVC_02_100x100.jpg?v=1784838556\"\u003e \u003c\/p\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 165.2px;\"\u003e\n\u003ctd style=\"height: 165.2px;\"\u003e\u003cem\u003eRotation Speed \u0026amp; Time\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 165.2px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eMax. 2000 rpm, adjustable\u003c\/li\u003e\n\u003cli\u003eRotation Stability:  ± 0.2% (Servo motor that can support 1.5 kg sample rotated at 2000 rpm)\u003c\/li\u003e\n\u003cli\u003eProgrammable 26 segments and each segment have 100 procedures for parameter setting. \u003c\/li\u003e\n\u003cli\u003eAcceleration speed can be set\u003c\/li\u003e\n\u003cli\u003eSetting Time: 1-9999 s\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 145.6px;\"\u003e\n\u003ctd style=\"height: 145.6px;\"\u003e\u003cem\u003eAutomatic Solution Dripping\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 145.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThe automatic solution feeding function for droplet dripping is available.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e          \u003cimg style=\"float: none;\" alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ESLLSPCVC_04_100x100.jpg?v=1784839264\"\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.8px;\"\u003e\n\u003ctd style=\"height: 86.8px;\"\u003e\u003cem\u003eHeating Function (\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eOptional\u003c\/span\u003e)\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 86.8px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThe bottom heating function is available for wet coating film dying\u003c\/li\u003e\n\u003cli\u003eThe maximum heating temperature is 200 °C. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 240.8px;\"\u003e\n\u003ctd style=\"height: 240.8px;\"\u003e\u003cem\u003eVacuum Pump (\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eOptional\u003c\/span\u003e)\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 240.8px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThe oilless vacuum pump (\u003ca href=\"https:\/\/echemsupplies.com\/products\/esovp?variant=47512544542950\u0026amp;_pos=3\u0026amp;_sid=dd23f3087\u0026amp;_ss=r\"\u003eESOVP\u003c\/a\u003e) can be considered for vacuum suction (-0.093 MPa). \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e        \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ESOVP_main_100x100.png?v=1775407970\" alt=\"\" style=\"float: none;\"\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eThe vacuum sensor is available on the spin coater to avoid sample was thrown away when vacuum level is not enough.  \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.8px;\"\u003e\n\u003ctd style=\"height: 86.8px;\"\u003e\u003cem\u003eCertification\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 86.8px;\"\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eCE certified\u003c\/li\u003e\n\u003cli\u003eUL and CSA certification is available upon request at extra cost\u003c\/li\u003e\n\u003cli\u003eOne year warranty and lifetime technical support and service.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\u003cem\u003eDimension\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eW950 * D840 * H1150 mm\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.6px;\"\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\u003cem\u003eWeight\u003c\/em\u003e\u003c\/td\u003e\n\u003ctd style=\"height: 47.6px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e~120 kg\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eReferences\u003c\/strong\u003e:\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/pubs.acs.org\/doi\/abs\/10.1021\/ja0470923\"\u003eP. Jiang, et al., Large-Scale Fabrication of Wafer-Size Colloidal Crystals, Macroporous Polymers and Nanocomposites by Spin-Coating, J. Am. Chem. Soc. 2004, 126, 42, 13778–13786\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.techno-press.org\/content\/?page=article\u0026amp;journal=amr\u0026amp;volume=2\u0026amp;num=4\u0026amp;ordernum=1\"\u003eM.D. Tyona, et al., A comprehensive study of spin coating as a thin film deposition technique and spin coating equipment, \u003cspan\u003eAdvances in Materials Research\u003c\/span\u003e, 2013, 2, 181-193\u003c\/a\u003e\u003c\/p\u003e","brand":"SYSL","offers":[{"title":"Default Title","offer_id":48035728294118,"sku":"ESLLSPCVC","price":28999.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0774\/6591\/1526\/files\/ESLLSPCVC_main.jpg?v=1784837881","url":"https:\/\/echemsupplies.com\/products\/esllspcvc","provider":"EChem Supplies","version":"1.0","type":"link"}