ECS-FM Programmable Ultrasonic Spray Coater (Max. 200*200 mm), EFMPUSC
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An Ultrasonic Spray Coater is a high-precision thin-film deposition system that uses ultrasonic energy to atomize liquids into a fine, low-velocity mist. Unlike conventional air-pressure spray guns, which use high-velocity air to "blast" liquid into droplets, ultrasonic spray systems utilize piezoelectric vibrations to create a much more controlled and uniform spray.
The process starts with an ultrasonic nozzle, which contains piezoelectric transducers. (1) Vibration to Mist: When high-frequency electrical energy is applied, the transducers vibrate longitudinally. Liquid is introduced to the nozzle tip, where these vibrations create standing waves. When the amplitude reaches a certain threshold, the liquid "disintegrates" into millions of micron-sized droplets. (2) Low-Velocity Plume: Because the droplets are created by vibration rather than high-pressure air, they emerge as a low-velocity mist. A very low-pressure carrier gas (usually Nitrogen or Air) is then used to shape the spray plume and direct it toward the substrate. (3) Droplet Uniformity: The droplet size is determined primarily by the frequency of the nozzle (e.g., 20 kHz, 50 kHz, or 120 kHz). Higher frequencies produce smaller droplets, which are ideal for the thin, dense membranes required for YSZ or GDC electrolytes.
The working mechanism of an ultrasonic spray is shown below:
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