Name: ECS-SL Single-Channel Automatic Spin Coater with Vacuum Chunk (Max. 150-350mm, 10000 rpm), ESLSCASCVC
Brand: SYSL
SKU: ESLSCASCVCS

ECS-SL Single-Channel Automatic Spin Coater with Vacuum Chunk (Max. 150-350mm, 10000 rpm), ESLSCASCVC

In Stock SKU: ESLSCASCVCS

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RFQ

A single-channel automatic spin coater is designed for high-reproducibility single-layer film deposition or single-solution dynamic casting. While multi-channel coaters are built for complex multi-layer stacks, a single-channel system focuses on absolute precision for one primary fluid line (such as a precursor solution, photoresist, or anti-solvent drip). It pairs a programmable spin motor with a single automated syringe pump or solenoid dispenser to remove human variation from dispense timing, height, and droplet volume.

It is mainly used for the following application fields: (1) Photoresist & Semiconductor Microlithography: Uniform deposition of positive/negative photoresists or anti-reflective coatings (ARC) onto silicon wafers. (2) Perovskite Anti-Solvent Quenching: Dedicated single-line dispensing of anti-solvent (e.g., chlorobenzene or diethyl ether) at an exact millisecond trigger during high-speed spinning to induce rapid, uniform crystallization. (3) Solid-State Electrolyte Films: Precision casting of polymer/salt matrices (e.g., PEO/LiTFSI) or slurry precursors onto current collectors. (4) Organic Photovoltaics (OPV) & OLEDs: Casting active donor/acceptor blend layers with tightly controlled film thickness.

Part Number	ESLSCASCVC (ESL-SCASC-VC)
Power	AC110-220V±10% (24V adaptor), single phase, 50/60Hz, 150 W
Solution Channels	Single solution or gas channels Automatic solution dropping for layer-by-layer coating Programmable parameter setting for automatic solution feeding
Chamber & Chuck Features	Chamber Materials: NPP Vacuum Chunk Material: PTFE (1) Small Chamber Diameter: 200 mm (the maximum acceptable substrate size is 150 mm); (2) Medium Chamber Diameter: 300 mm (the maximum acceptable substrate size is 250 mm); (3) Large Chamber Diameter: 400 mm (the maximum acceptable substrate size is 350 mm) Vacuum Chunk Size: 4" (standard version included). Other customized options in 10-350 mm can be supplied upon request. 4" 6" 3" 2" 1"
Rotation Speed & Time	300-10000 rpm, adjustable Rotation Stability: ± 0.1% (Servo motor, 450 W that can support 500 g sample rotated at 2000 rpm) Programmable 26 segments and each segment have 51 procedures for parameter setting. Acceleration speed can be set Setting Time: 1-9999 s
Vacuum Pump (Optional)	The oilless vacuum pump (ESOVP) can be considered for vacuum suction (-0.093 MPa). The vacuum sensor is available on the spin coater to avoid sample was thrown away when vacuum level is not enough.
Certification	CE certified UL and CSA certification is available upon request at extra cost One year warranty and lifetime technical support and service.
Dimension	W260 * D350 * H260 mm
Weight	~12 kg