ECS-N 1200℃ Horizontal Three Zones (200+400+200 mm) Tube Furnace (Quartz Tube: Φ50-100*1400mm) with Touch Screen Control for CVD, ENH3ZTFTSC1200

• ENH3ZTFTSC1200 (EN-H3ZTFTSC1200)

• Dual-layer structure design with steel.
• High purity Al2O3 insulation materials for saving energy  
• High purity Al2O3 coating that elongate the heating element lifetime 
• Al2O3 heating block builds up ideal temperature gradient

• The three heating zones design is suitable for CVD experiment, where the vapor of precursor 1, 2, and 3 are flowed together onto the substrate and form the desirable product. 

• Power: AC380V±10%, three-phases, 50/60Hz, 8 kW (2kW + 4kW + 2kW)
• Heating Temperature: Max. 1200 ℃ (<1 h)
• Continuous Operation Temperature: 300-1150 ℃ (±1℃)
  
• Heating Rate: ≤20℃/min
• Processing quartz tube: (1) Φ50*1400mm; (2) Φ60*1400mm; (3) Φ80*1400mm; (4) Φ100*1400mm 
• Heating Zone: 200+400+200 mm (independently control the three heating zones); The constant heating zone length is 100+200+100mm.
  
• Heating Element: Mo-doped Fe-Cr-Al

• Sealing Flanges are included, but the temperature calibration probe can be supplied upon request with additional cost. 
  

• One flowmeter has been installed and inspected for ready use. 

• Programmable temperature setting profiles in a 7" touch screen control panel. There are maximum 15 heating profiles can be saved for repeatable use.   

Vacuum Pump (Optional)

• A vacuum pump (EDSRVVP) can be supplied to provide high vacuum (~10 Pa) for sample processing in quartz tube

• The door is not allowed to be opened when the furnace temperature higher than 300 ℃
• The inner pressure inside the quartz tube should be less than 0.125 MPa (absolute value) to avoid damage by overpressure
• Under vacuum condition, the heating temperature should be less than 800 ℃
• The gas pressure regulator (0.01-0.15 MPa) should be installed if the high pressure gas tank is used 
• Please watch out the gas pressure in quartz tube when the inlet and outlet gas valves are closed during heating condition. 
• The minor cracks on the furnace hearth insulation layer are normal and won't affect its operation.