ECS-N 1200℃ Horizontal Multiple-Zones (3-6 Zones) CVD Tube Furnace System, ENHMZCVDTFS1200

• ENHMZCVDTFS1200 (EN-HMZCVDTFS1200)

• High purity quartz tube with high anti-corrosion performance
• High purity Al2O3 insulation materials for saving energy 
• Tube hearth with dual air-cooling structure and automatic open top cover 
• Programming heating recipe setting and recording for continuous annealing
  

• The multiple heating zones design is suitable for CVD experiment, where the vapor of different precursors are flowed together onto the substrate and form the desirable product. The follow picture shows the working mechanism of the typical two zones CVD system. 

• Power: AC380V±10%, three-phases, 50/60Hz, (1) Three Zones:  6-10 kW; (2) Four Zones: 8-14 kW; (3) 10-15 kW; (4) 12-18 kW 
• Heating Temperature: Max. 1200 ℃ (<1 h)
• Continuous Operation Temperature: 300-1150 ℃ (±1℃)
  
• Heating Rate: ≤20℃/min
• Processing quartz tube: Φ50*1600mm (standard size). Other size options, such as Φ25*1600mm, Φ60*1600mm, Φ80*1600mm, and Φ100*1600mm also can be supplied upon request.
• Heating Zone:

          (1) Three Zones: (i) 200mm*3; (ii) 200+300+200mm; (iii) 200+400+200mm;

               (iv) 300mm*3; (v) 300+400+300 mm

          (2) Four Zones: (i) 200mm*4; (ii) 200+300+300+200mm; (iii) 200+400+400+200 mm

               (iv) 300mm*4; (v) 300+400+400+300mm

          (3) Five Zones: (i) 200mm*5; (ii) 300mm*5

          (4) Six Zones: (i) 200mm*6; (ii) 300mm*6

• Heating Element: Mo-doped Fe-Cr-Al

• Sealing Flanges are included, but the temperature calibration probe can be supplied upon request with additional cost. 
  

• Programmable temperature setting profiles in a 7" touch screen control panel. There are maximum 15 heating profiles can be saved for repeatable use.   

Gas Flow System (Optional)

• The gas flow unit with 2-4 channels (eg: ENEMCGMSR, ENMCGMSTS) can be integrated into the CVD system.
• The flow rates 50-500 sccm are available. 

Low Vacuum System (Optional)

• AC220V±10%, single-phases, 50/60Hz, ~600 W
• Vacuum Pumping Speed: 3 L/s
• Gas inlet/outlet Port Size: KF16/25
• System Vacuum: 3-5 Pa
  

High Vacuum System (Optional)

• AC220V±10%, single-phases, 50/60Hz, ~1500 W
• Vacuum Pumping Speed: 110 L/s (even higher one, such as 600 L/s can be supplied upon request).
• Digital vacuum gauge
• Gas inlet/outlet Port Size: KF25
• System Vacuum: 4.3*10^(-3) Pa