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ECS-N 1500℃ High Vacuum (10^-5 Pa) Horizontal Tube Furnace (Alumina Tube: Φ100*1200mm) with Touch Screen Control, ENHVHTFTSC1500

ECS-N 1500℃ High Vacuum (10^-5 Pa) Horizontal Tube Furnace (Alumina Tube: Φ100*1200mm) with Touch Screen Control, ENHVHTFTSC1500

In Stock (Ships 3~8 Days) SKU: ENHVHTFTSC1500
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A 1500°C High Vacuum ($10^{-5}\text{ Pa}$ range) Horizontal Tube Furnace with Touch Screen Control represents an advanced, high-temperature thermal processing system designed for rigorous materials research, high-purity alloy synthesis, vacuum sintering, and chemical vapor deposition (CVD). Achieving a high-vacuum threshold of 10^{-5} Pa (equivalent to ~10^{-7} torr) requires a multi-stage pumping architecture integrated directly with precision touch-screen automation.

The key items are vacuum pumps and processing tube: Pumping Stack (Turbo-Molecular + Rotary Vane backing). While a standard rotary or mechanical booster pump can only achieve rough vacuum (~ 10^{-1} to 10^{-2} Pa), reaching a high vacuum of 10^{-5} Pa requires a turbomolecular pump (TMP) backed by an oil-sealed or scroll roughing pump. High-vacuum gate valves, metal seal gaskets (such as ConFlat/CF flanges), and helium-leak-tested stainless steel manifolds are mandatory to eliminate outgassing and micro-leaks at high temperatures. Processing Tube Selection: At 1500°C, standard quartz tubes soften and collapse. Systems in this range utilize high-purity recrystallized alumina (Al2O3, corundum) or specialty ceramic/silicon carbide (SiC) tubes capable of withstanding extreme thermal loads and high-vacuum differentials.

Part Number
  • ENHVHTFTSC1500 (EN-HVHTFTSC1500)
General Features
  • The maximum heating temperature is up to 1500℃ at a fast heating rate with Si-C heating element
  • The vacuum level can be up to 10^(-5) Pa with the combination of rotary van mechanical pump and turbomolecular pump.
  • Various gases can be flowed into the alumina tube for annealling
  • Convenient touch screen operation and data management. 
Tube Furnace Features
  • Power: AC380V±10%, three-phases, 50/60Hz, 15 kW
  • Heating Temperature: Max. 1500℃ (±1℃)
  • Continuous Operation Temperature: 1450℃
  • Heating Rate: ≤20℃/min
  • Processing Alumina Tube: 100*1200mm (other tube dimension also can be supplied upon request).
  • Heating Hearth Space: L640*H160*W140mm 
  • Heating Element: High purity Si-C

         

  • The sealing flanges and vacuum gauge are included for ensuring high vacuum target.

               

  • The rotary vacuum pump and turbomolecular pump are integrated for vacuum level of 10^(-5) Pa   
  • One flowmeter has been installed (5000SCCM, φ6.35 input connector and φ8 output barber fitting) and inspected for ready use. 
  • Programmable temperature setting profiles in a 7" touch screen control panel. There are maximum 15 heating profiles can be saved for repeatable use.   
Certification
  • CE certified
  • UL and CSA certification is available upon request at extra cost
  • One-year warranty and life-time technical support. 
Dimension
  • L1400 × D900× H1440 mm
Weight
  • ~350 kg


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