ECS-N 1500℃ High Vacuum (10^-5 Pa) Horizontal Tube Furnace (Alumina Tube: Φ100*1200mm) with Touch Screen Control, ENHVHTFTSC1500
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A 1500°C High Vacuum ($10^{-5}\text{ Pa}$ range) Horizontal Tube Furnace with Touch Screen Control represents an advanced, high-temperature thermal processing system designed for rigorous materials research, high-purity alloy synthesis, vacuum sintering, and chemical vapor deposition (CVD). Achieving a high-vacuum threshold of 10^{-5} Pa (equivalent to ~10^{-7} torr) requires a multi-stage pumping architecture integrated directly with precision touch-screen automation.
The key items are vacuum pumps and processing tube: Pumping Stack (Turbo-Molecular + Rotary Vane backing). While a standard rotary or mechanical booster pump can only achieve rough vacuum (~ 10^{-1} to 10^{-2} Pa), reaching a high vacuum of 10^{-5} Pa requires a turbomolecular pump (TMP) backed by an oil-sealed or scroll roughing pump. High-vacuum gate valves, metal seal gaskets (such as ConFlat/CF flanges), and helium-leak-tested stainless steel manifolds are mandatory to eliminate outgassing and micro-leaks at high temperatures. Processing Tube Selection: At 1500°C, standard quartz tubes soften and collapse. Systems in this range utilize high-purity recrystallized alumina (Al2O3, corundum) or specialty ceramic/silicon carbide (SiC) tubes capable of withstanding extreme thermal loads and high-vacuum differentials.
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