ECS-N 1200℃ Rapid Thermal Processing (RTP) Tube Furnace (Quartz Tube: Φ80*120mm) with IR Heater and Touch Screen Control, ENRTPTFIRTSC1200

A 1200°C Rapid Thermal Processing (RTP) Tube Furnace with Touch Screen Control is an advanced laboratory thermal system engineered for rapid heating, rapid cooling, and precise atmospheric control. It is widely utilized in cutting-edge materials research, semiconductor device fabrication, rapid thermal annealing (RTA), rapid thermal oxidation (RTO), and the synthesis of advanced energy storage components (such as solid-state battery electrolytes and catalyst-coated substrates).

The main structural and functional features of the RTP tube furnace are: (1) Rapid Heating & Cooling Mechanisms: Sliding/Mobile Furnace Design: Many RTP tube furnace configurations mount the heating chamber on motorized or manual slide rails. The furnace can remain pre-heated at the target temperature (e.g., 1000-1200℃), allowing the quartz tube or sample boat to be rapidly mechanically shifted into or out of the hot zone for instantaneous thermal shock or quenching. High-Intensity IR/Resistance Elements: Utilizes high-purity ceramic fiber insulation combined with fast-responding heating elements (such as embedded infrared quartz heating lamps or low-thermal-mass resistance wires) capable of steep ramp rates. (2) Intelligent Touch Screen & PLC Control: Replaces legacy analog controllers with a user-friendly, high-definition color touch panel interface. Programmable multi-segment profiles (typically 30+ segments) allowing precise control over ramp rates, dwell/soaking times, and cooling rates. Data logging capabilities to store multiple experimental curves, real-time temperature tracking, built-in over-temperature cutoffs, and thermocouple-break safety diagnostics.